2022
Release time:
2024-09-14
2022,the first batch of intelligent cryopump to integrated circuit equipment users; The first domestical system which can produce high-purity Helium gas using joint methods was successfully put into operation.
2022, the first batch of intelligent cryopump to integrated circuit equipment users;
The first domestical system which can produce high-purity Helium gas using joint methods was successfully put into operation.
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