Cryopump

Introduction
Cryopump (also known as cold pump) is a kind of ultra-high vacuum equipment which uses the principle of cryogenic condensation and cryogenic adsorption to extract air. It is widely used in the manufacturing process of semiconductor, integrated circuit, optical coating, solar panel, flat panel display, optoelectronic devices and vacuum electronic devices. It is one of the key components of integrated circuit manufacturing process equipment PVD and ion implantation. Cryopump is also used in various vacuum applications such as space environment simulation, high energy physics, accelerator, vacuum calibration and detection
Features
♦ Fast pumping speed
♦ Safe and reliable operation and low cost
♦ Intelligent automatic control system
♦ Good adaptability to vacuum system
♦ Clean and pollution-free
♦ Excellent ultimate vacuum
♦ Fast regeneration function
♦ Flexible installation in any direction
♦ A pump group system with multiple cryogenic pumps and one compressor can be constructed
Function
Cryopump is suitable for application in the hope of getting vacuum degree from 10-3 pa to 10-9 Pa, especially suitable for application which requires oil-free and rapid extraction, such as: sputtering film coating, evaporation coating, ion implantation, molecular beam epitaxy, space simulation device, high energy physics research equipment, electron beam device, accelerator beam pipe, surface analysis device, mass spectrometer, vacuum exhaust device, other high vacuum or ultra high vacuum device.
Specifications
Standard cryopump:

♦ In the model, prefix I represents the integrated intelligent control system, and suffix N represents the horizontal structure pump;
♦ Caliber from DN200mm to DN500mm;
♦ Inlet flange can be CF, ISO, ANSI form or special customization;
♦ CP series standard configuration: helium compressor, helium hoses, temperature monitor, connection cables;
♦ ICP series standard configuration: helium compressor, helium hoses, connection cables, vacuum valve, inflatable valve, vacuum silicon tube, intelligent controller, regenerative heater, hand operator.

Large diameter cryocomp:

♦ Caliber from DN630mm to DN1250mm;
♦ Structure and configuration can be customized;
♦ In the model, suffix LN represents liquid nitrogen auxiliary cooling.