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Cryopump

Cryocooler & Cryopump

制冷机与真空泵

Cryopump

Cryopump

Description:
Description:
Information

Introduction
Cryopump (also known as cold pump) is a kind of ultra-high vacuum equipment which uses the principle of cryogenic condensation and cryogenic adsorption to extract air. It is widely used in the manufacturing process of semiconductor, integrated circuit, optical coating, solar panel, flat panel display, optoelectronic devices and vacuum electronic devices. It is one of the key components of integrated circuit manufacturing process equipment PVD and ion implantation. Cryopump is also used in various vacuum applications such as space environment simulation, high energy physics, accelerator, vacuum calibration and detection
Features
♦ Fast pumping speed
♦ Safe and reliable operation and low cost
♦ Intelligent automatic control system
♦ Good adaptability to vacuum system
♦ Clean and pollution-free
♦ Excellent ultimate vacuum
♦ Fast regeneration function
♦ Flexible installation in any direction
♦ A pump group system with multiple cryogenic pumps and one compressor can be constructed
Function
Cryopump is suitable for application in the hope of getting vacuum degree from 10-3 pa to 10-9 Pa, especially suitable for application which requires oil-free and rapid extraction, such as: sputtering film coating, evaporation coating, ion implantation, molecular beam epitaxy, space simulation device, high energy physics research equipment, electron beam device, accelerator beam pipe, surface analysis device, mass spectrometer, vacuum exhaust device, other high vacuum or ultra high vacuum device.
Specifications
Standard cryopump:

Model

Elbow Pump

CP200N/ICP200N

CP250N/ICP250N

CP300N/ICP300N

 

CP400/ICP400

 

CP500/ICP500

Straight pump

CP200/ICP200

CP250/ICP250

CP300/ICP300

Rough Pumping Interface

KF25 KF25 KF25 KF25 KF25

Inlet Flange
(Can be customized according to user’s requirements)

CF 200

CF 250

CF 300

 

ISO 400

 

ISO 500

ISO 200

ISO 250

ISO 320

ANSI 8in (NW )

ANSI 10in (NW )

ANSI 12in (NW )

ANSI 16 in (NW )

ANSI 20in (NW )

Ultimate Pressure

10-7Pa

10-7Pa

10-7Pa

10-7Pa

10-7Pa

Pumping Speeds (l/s)

For H2O

4000

6500

9500

16000

30000

For Air

1500

2200

3200

6000

10000

For H2

2200

3200

5400

9000

12000

For Ar

1200

1800

2800

5000

8400

Throughput(Torr.l/s)

For Ar

8.5

9

10

11.5

12

Capacity (Std.l)

For Ar

1000

1600

2000

2500

5500

For H2

12

16

22

25

35

Cool Down Time (min)

<100

<100

<150

<180

<210

♦ In the model, prefix I represents the integrated intelligent control system, and suffix N represents the horizontal structure pump;
♦ Caliber from DN200mm to DN500mm;
♦ Inlet flange can be CF, ISO, ANSI form or special customization;
♦ CP series standard configuration: helium compressor, helium hoses, temperature monitor, connection cables;
♦ ICP series standard configuration: helium compressor, helium hoses, connection cables, vacuum valve, inflatable valve, vacuum silicon tube, intelligent controller, regenerative heater, hand operator.

Large diameter cryocomp:

Model

CP630

CP800           

CP1000LN

CP1250LN

Inlet Flange

ISO 630

ISO 800

ISO 1000

ISO 1250

Ultimate Pressure (Pa)

10-7Pa

10-7Pa

10-7Pa

10-7Pa

Pumping   Speeds (l/s)

For H2O

46000

70000

110000

180000

For Air/N2

18000

28000

40000

57000

For H2

14000

30000

34000

60000

For Ar

13500

23000

32000

47000

Throughput(Torr.l/s)

For Ar

14

18

18

18

Capacity (Std.l)

For Ar

6000

6000

7000

9000

For H2

65

70

80

150

Cool Down Time (min)

<180

<240

<240

<330

LN2 Consumption(l/hr)

-

-

16

20

♦ Caliber from DN630mm to DN1250mm;
♦ Structure and configuration can be customized;
♦ In the model, suffix LN represents liquid nitrogen auxiliary cooling.

 

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